| https://dblp.org/rdf/schema#authoredBy
|
https://dblp.org/pid/16/1535 +
, https://dblp.org/pid/69/2745 +
, https://dblp.org/pid/161/7512 +
, https://dblp.org/pid/94/5035 +
, https://dblp.org/pid/87/1108 +
, https://dblp.org/pid/161/7458 +
|
| https://dblp.org/rdf/schema#bibtexType
|
http://purl.org/net/nknouf/ns/bibtex#Article +
|
| https://dblp.org/rdf/schema#createdBy
|
https://dblp.org/pid/16/1535 +
, https://dblp.org/pid/69/2745 +
, https://dblp.org/pid/161/7512 +
, https://dblp.org/pid/94/5035 +
, https://dblp.org/pid/87/1108 +
, https://dblp.org/pid/161/7458 +
|
| https://dblp.org/rdf/schema#documentPage
|
https://doi.org/10.3390/MI7020019 +
|
| https://dblp.org/rdf/schema#doi
|
https://doi.org/10.3390/MI7020019 +
|
| https://dblp.org/rdf/schema#listedOnTocPage
|
https://dblp.org/db/journals/micromachines/micromachines7 +
|
| https://dblp.org/rdf/schema#numberOfCreators
|
6
|
| https://dblp.org/rdf/schema#pagination
|
19
|
| https://dblp.org/rdf/schema#primaryDocumentPage
|
https://doi.org/10.3390/MI7020019 +
|
| https://dblp.org/rdf/schema#publishedIn
|
Micromachines
|
| https://dblp.org/rdf/schema#publishedInJournal
|
Micromachines
|
| https://dblp.org/rdf/schema#publishedInJournalVolume
|
7
|
| https://dblp.org/rdf/schema#publishedInJournalVolumeIssue
|
2
|
| https://dblp.org/rdf/schema#publishedInStream
|
https://dblp.org/streams/journals/micromachines +
|
| https://dblp.org/rdf/schema#title
|
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution.
|
| https://dblp.org/rdf/schema#wikidata
|
http://www.wikidata.org/entity/Q64932465 +
|
| https://dblp.org/rdf/schema#yearOfPublication
|
2016
|
| owl:sameAs |
https://doi.org/10.3390/MI7020019 +
, http://dx.doi.org/10.3390/MI7020019 +
, http://www.wikidata.org/entity/Q64932465 +
|
| rdf:type |
https://dblp.org/rdf/schema#Publication +
, https://dblp.org/rdf/schema#Article +
|
| rdfs:label |
Han Lu et al.: Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. (2016)
|
