http://dbpedia.org/ontology/abstract
|
Megasonic cleaning is a type of acoustic c … Megasonic cleaning is a type of acoustic cleaning, related to ultrasonic cleaning. It is a gentler cleaning mechanism, less likely to cause damage, and is used in wafer, medical implant, and industrial part cleaning. Similar to ultrasonic cleaning, megasonics utilizes a transducer that usually sits atop a piezoelectric substrate. The transducer creates an acoustic field at a much higher frequency (typically 0.8–2 MHz) compared to ultrasonic cleaning (20-200 kHz). As a result, the cavitation that occurs is gentler and on a much smaller scale. Megasonics are currently used mainly in the electronics industry for preparation of silicon wafers.ndustry for preparation of silicon wafers.
|
http://dbpedia.org/ontology/wikiPageID
|
8414306
|
http://dbpedia.org/ontology/wikiPageLength
|
3288
|
http://dbpedia.org/ontology/wikiPageRevisionID
|
1095986232
|
http://dbpedia.org/ontology/wikiPageWikiLink
|
http://dbpedia.org/resource/Piezoelectric +
, http://dbpedia.org/resource/Frequency +
, http://dbpedia.org/resource/Ultrasonic_cleaning +
, http://dbpedia.org/resource/Cavitation +
, http://dbpedia.org/resource/Parts_cleaning +
, http://dbpedia.org/resource/Category:Ultrasound +
, http://dbpedia.org/resource/Transducer +
, http://dbpedia.org/resource/Category:Cleaning_methods +
, http://dbpedia.org/resource/Acoustic_cleaning +
, http://dbpedia.org/resource/Ultrasonic_cavitation_device +
|
http://dbpedia.org/property/wikiPageUsesTemplate
|
http://dbpedia.org/resource/Template:More_citations_needed +
, http://dbpedia.org/resource/Template:Reflist +
, http://dbpedia.org/resource/Template:Tone +
, http://dbpedia.org/resource/Template:Multiple_issues +
|
http://purl.org/dc/terms/subject
|
http://dbpedia.org/resource/Category:Ultrasound +
, http://dbpedia.org/resource/Category:Cleaning_methods +
|
http://purl.org/linguistics/gold/hypernym
|
http://dbpedia.org/resource/Cleaning +
|
http://www.w3.org/ns/prov#wasDerivedFrom
|
http://en.wikipedia.org/wiki/Megasonic_cleaning?oldid=1095986232&ns=0 +
|
http://xmlns.com/foaf/0.1/isPrimaryTopicOf
|
http://en.wikipedia.org/wiki/Megasonic_cleaning +
|
owl:sameAs |
http://dbpedia.org/resource/Megasonic_cleaning +
, http://rdf.freebase.com/ns/m.0272l3g +
, http://yago-knowledge.org/resource/Megasonic_cleaning +
, http://www.wikidata.org/entity/Q6808872 +
, https://global.dbpedia.org/id/4sBRQ +
|
rdfs:comment |
Megasonic cleaning is a type of acoustic cleaning, related to ultrasonic cleaning. It is a gentler cleaning mechanism, less likely to cause damage, and is used in wafer, medical implant, and industrial part cleaning.
|
rdfs:label |
Megasonic cleaning
|