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A MEMS thermal actuator is a that typicall … A MEMS thermal actuator is a that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped single crystal silicon or polysilicon as a , the increase in temperature can be achieved internally by or something by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.uators can be integrated into micromotors.
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A MEMS thermal actuator is a that typicall … A MEMS thermal actuator is a that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped single crystal silicon or polysilicon as a , the increase in temperature can be achieved internally by or something by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.uators can be integrated into micromotors.
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MEMS thermal actuator
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