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Computational lithography (also known as c … Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as the semiconductor industry grappled with the challenges associated with the transition to 22 nanometer CMOS fabrication process technology and beyond.fabrication process technology and beyond.
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| rdfs:comment |
Computational lithography (also known as c … Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as the semiconductor industry grappled with the challenges associated with the transition to 22 nanometer CMOS fabrication process technology and beyond.fabrication process technology and beyond.
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Computational lithography
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